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Thin Film Au-VOx Alloys for contacting MEMS (Technology #: 103006-02)
A new gold-vanadium oxide alloy that exhibits high hardness and low electrical resistivity compared to other gold alloys used in micromechanical switches has been developed for radio frequency devices used in communication and sensing (e.g., radar) equipment. One design for such a switch depends on the reliable closure of electrical contacts for...
Published: 10/14/2009
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Updated: 2/27/2009
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Inventor(s):
Richard Vinci
,
Walter Brown
,
Thirumalesh Bannuru
Keywords(s):
Category(s):
Materials and Nanotechnology
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