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Fabrication of Low-Loss Silicon-on-Insulator Optical Waveguides (Technology#: 111004-01)
Disclosed is a method of fabricating an optical waveguide device including the steps of forming a mask over a waveguide core material layer so as to leave a portion of the layer exposed, and exposing the structure to an oxidizing environment to form an oxide layer on the waveguide core material layer at least in the exposed portion thereby defining...
Published: 9/7/2009
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Updated: 3/16/2009
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Inventor(s):
Thomas Koch
,
Robert Pafchek
,
Mark Webster
Keywords(s):
Electrical
,
High Quality Optics
Category(s):
Electronics
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