Fabrication of Low-Loss Silicon-on-Insulator Optical Waveguides (Technology#: 111004-01)

Disclosed is a method of fabricating an optical waveguide device including the steps of forming a mask over a waveguide core material layer so as to leave a portion of the layer exposed, and exposing the structure to an oxidizing environment to form an oxide layer on the waveguide core material layer at least in the exposed portion thereby defining the lateral dimension of the waveguide core. The resulting waveguide core has extremely smooth surfaces for low optical losses.

ADVANTAGES

• Ability to enable the integration of optical devices with electronics on a single chip

• Provides method of fabricating optical waveguide devices with low losses

APPLICATIONS

• Devices that perform both optical and electrical functions

STATUS OF INTELLECTUAL PROPERTY

A US utility patent application has been filed: 20060098928


Thomas Koch's Lehigh Page